Characterising the Radio Frequency Plasma Source for Glow...

ISIJ International 2002 Vol. 42; Iss. Suppl

Characterising the Radio Frequency Plasma Source for Glow Discharge Optical Emission Spectroscopy

Payling, Richard, Chapon, Patrick, Bonnot, Olivier, Belenguer, Philippe, Guillot, Philippe, Pitchford, Leanne C., Therese, Laurent, Michler, Johann, Aeberhard, Max
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Volume:
42
Year:
2002
Language:
english
Journal:
ISIJ International
DOI:
10.2355/isijinternational.42.suppl_s101
File:
PDF, 428 KB
english, 2002
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