Role of deposition and annealing of the top gate dielectric...

Semiconductor Science and Technology 2017 / 03 Vol. 32; Iss. 3

Role of deposition and annealing of the top gate dielectric in a-IGZO TFT-based dual-gate ion-sensitive field-effect transistors

Kumar, Narendra, Sutradhar, Moitri, Kumar, Jitendra, Panda, Siddhartha
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Volume:
32
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aa5584
Date:
March, 2017
File:
PDF, 1.10 MB
english, 2017
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