Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 09 Vol. 33; Iss. 5
Detection of dead layers and defects in polycrystalline Cu 2 O thin-film transistors by x-ray reflectivity and photoresponse spectroscopy analyses
Ran, Fan-Yong, Hiramatsu, Hidenori, Hosono, Hideo, Kamiya, Toshio, Taniguti, MasatakaVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929445
Date:
September, 2015
File:
PDF, 1.80 MB
english, 2015