Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 01 Vol. 34; Iss. 1
Novel soft stamp development for direct micro- and nano-patterning of macroscopic curved surfaces
Lim, Su Hui, Low, Hong Yee, Tan, Wui SiewVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4938075
Date:
January, 2016
File:
PDF, 2.59 MB
english, 2016