Adhesion Property Between Cu, Ti Metal and SU-8, AZ 4620...

Journal of Nanoscience and Nanotechnology 2016 / 07 Vol. 16; Iss. 7

Adhesion Property Between Cu, Ti Metal and SU-8, AZ 4620 Polymer Dielectric

Huang, Yen-Jun, Hsieh, Yen-Hui, Shih, Jian-Yu, Chen, Han-Chun, Leu, Jihperng, Chen, Kuan-Neng
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Volume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12596
Date:
July, 2016
File:
PDF, 5.88 MB
english, 2016
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