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[Advanced Micro and Nanosystems] Resonant MEMS (Fundamentals, Implementation and Application) || Electrothermal Excitation of Resonant MEMS

Brand, Oliver, Dufour, Isabelle, Heinrich, Stephen M., Josse, Fabien
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Volume:
10.1002/97
Year:
2015
Language:
english
DOI:
10.1002/9783527676330.ch8
File:
PDF, 548 KB
english, 2015
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