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Liquid metal alloy ion sources—An alternative for focussed ion beam technology
Bischoff, Lothar, Mazarov, Paul, Bruchhaus, Lars, Gierak, JacquesVolume:
3
Language:
english
Journal:
Applied Physics Reviews
DOI:
10.1063/1.4947095
Date:
June, 2016
File:
PDF, 6.18 MB
english, 2016