![](/img/cover-not-exists.png)
Transient evolution of the target erosion profile during magnetron sputtering: Dependence on gas pressure and magnetic configuration
Nakano, Takeo, Saitou, Yudai, Oya, KeiLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.12.053
Date:
December, 2016
File:
PDF, 716 KB
english, 2016