Transient evolution of the target erosion profile during...

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Transient evolution of the target erosion profile during magnetron sputtering: Dependence on gas pressure and magnetic configuration

Nakano, Takeo, Saitou, Yudai, Oya, Kei
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.12.053
Date:
December, 2016
File:
PDF, 716 KB
english, 2016
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