A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Hopkins, Jonathan B., Panas, Robert M., Song, Yuanping, White, Carolyn D.
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2628723
Date:
February, 2017
File:
PDF, 1.82 MB
english, 2017
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