Novel Stacked Nanodisk with Quantum Effect Fabricated by...

Applied Physics Express 2008 / 8 Vol. 1

Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching

Huang, Chi-Hsien, Igarashi, Makoto, Nishioka, Kensuke, Takeguchi, Masaki, Uraoka, Yukiharu, Fuyuki, Takashi, Yamashita, Ichiro, Samukawa, Seiji
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Volume:
1
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.084002
Date:
August, 2008
File:
PDF, 288 KB
english, 2008
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