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Anisotropic Bulk Etching of (110) Silicon with High Aspect Ratio
Kim, Seong-Hyok, Lee, Sang-Hun, Lim, Hyung-Taek, Kim, Yong-Kweon, Lee, Seung-KiVolume:
118
Year:
1998
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.118.32
File:
PDF, 3.70 MB
english, 1998