[AIP ION IMPLANTATION TECHNOLOGY: 16th International...

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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Tuning of Etching Rate by Implantation: Silicon, Polysilicon and Oxide

Charavel, Rémy, Raskin, Jean-Pierre
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Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401523
File:
PDF, 197 KB
english, 2006
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