Determination of deposited flux and energy of sputtered tungsten atoms on every stages of transport in HiPIMS discharge
Desecures, M, de Poucques, L, Bougdira, JVolume:
26
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/26/2/025003
Date:
December, 2016
File:
PDF, 4.54 MB
english, 2016