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Influence of deposition angle on the structural, morphological and optical properties of sputtered AlN thin films
Ravankhah, Mahbobeh, Savaloni, HadiVolume:
132
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2016.12.067
Date:
March, 2017
File:
PDF, 1.92 MB
english, 2017