Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 09 Vol. 33; Iss. 5
Design of nonlinear metamorphic buffer layers for lattice-mismatched In x Ga 1−x As/GaAs (001) semiconductor devices
Kujofsa, Tedi, Ayers, John E.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929411
Date:
September, 2015
File:
PDF, 532 KB
english, 2015