Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 01 Vol. 34; Iss. 1
Nanopatterning process based on epitaxial masking for the fabrication of electronic and spintronic devices made of La 0.67 Sr 0.33 MnO 3 /LaAlO 3 /SrTiO 3 heterostructures with in situ interfaces
Telesio, Francesca, Pellegrino, Luca, Pallecchi, Ilaria, Marré, Daniele, Esposito, Emanuela, di Gennaro, Emiliano, Khare, Amit, Miletto Granozio, FabioVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4938484
Date:
January, 2016
File:
PDF, 2.06 MB
english, 2016