Liquid-metal-enabled synthesis of aluminum-containing...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 03 Vol. 34; Iss. 2

Liquid-metal-enabled synthesis of aluminum-containing III-nitrides by plasma-assisted molecular beam epitaxy

Liang, Yu-Han, Nuhfer, Noel T., Towe, Elias
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943016
Date:
March, 2016
File:
PDF, 1.38 MB
english, 2016
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