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Pilot-scale electron cyclotron resonance-metal organic chemical vapor deposition system for the preparation of large-area fluorine-doped SnO 2 thin films
Jeon, Bup Ju, Hudaya, Chairul, Lee, Joong KeeVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4943389
Date:
May, 2016
File:
PDF, 1.74 MB
english, 2016