LPCVD SiN x thin film on c-Si wafer by spectroscopic ellipsometry
Gautam, Laxmi Karki, Ye, Ligang, Podraza, Nikolas J.Volume:
23
Language:
english
Journal:
Surface Science Spectra
DOI:
10.1116/1.4954192
Date:
June, 2016
File:
PDF, 701 KB
english, 2016