Effect of N 2 microplasma...

Japanese Journal of Applied Physics 2016 / 08 Vol. 55; Iss. 8

Effect of N 2 microplasma treatment on initial growth of GaN by metal–organic molecular beam epitaxy

Suzuki, Yohei, Kusakabe, Yasuhiro, Uchiyama, Shota, Maruyama, Takahiro, Naritsuka, Shigeya, Shimizu, Kazuo
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.081002
Date:
August, 2016
File:
PDF, 1.83 MB
english, 2016
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