Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
Kilpi, Lauri, Ylivaara, Oili M. E., Vaajoki, Antti, Malm, Jari, Sintonen, Sakari, Tuominen, Marko, Puurunen, Riikka L., Ronkainen, HelenaVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935959
Date:
January, 2016
File:
PDF, 2.17 MB
english, 2016