Growth of free-standing wurtzite AlGaN by MBE using a...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 03 Vol. 34; Iss. 2

Growth of free-standing wurtzite AlGaN by MBE using a highly efficient RF plasma source

Novikov, Sergei V., Staddon, Chris R., Whale, Josh, Kent, Anthony J., Foxon, C. Thomas
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4940155
Date:
March, 2016
File:
PDF, 555 KB
english, 2016
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