Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 5
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Radio frequency plasma chemical vapor deposited thin films of diamond-like carbon/SiO[sub 2] nanocomposites by way of tetraethoxysilane
Senkevich, Jay J., Leber, Donald E., Tutor, Michael J., Heiks, Noel A., Ten Eyck, Greg A., Scherrer, David W.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590925
File:
PDF, 112 KB
english, 1999