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Microsystem Technologies 2016 / 12

Fabrication and investigation of low actuation voltage curved beam bistable MEMS switch

Joshitha, C., Sreeja, B. S., Sasi Princy, S., Radha, S.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3235-2
Date:
December, 2016
File:
PDF, 2.11 MB
english, 2016
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