Correlation of interface roughness for ion beam sputter...

Correlation of interface roughness for ion beam sputter deposited W/Si multilayers

Biswas, A., Bhattacharyya, D.
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Volume:
109
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3573662
Date:
April, 2011
File:
PDF, 423 KB
english, 2011
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