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Electron caustic lithography
Kennedy, S. M., Zheng, C. X., Fu, J., Tang, W. X., Paganin, D. M., Jesson, D. E.Volume:
2
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4730139
Date:
June, 2012
File:
PDF, 541 KB
english, 2012