Development of cup-shaped micro-electromechanical systems-based vector hydrophone
Xu, Wei, Liu, Yuan, Zhang, Guojun, Wang, Renxin, Xue, Chenyang, Zhang, Wendong, Liu, JunVolume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4962859
Date:
September, 2016
File:
PDF, 3.39 MB
english, 2016