Atomic layer deposition of environmentally benign SnTiO...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 01 Vol. 34; Iss. 1

Atomic layer deposition of environmentally benign SnTiO x as a potential ferroelectric material

Chang, Siliang, Selvaraj, Sathees Kannan, Choi, Yoon-Young, Hong, Seungbum, Nakhmanson, Serge M., Takoudis, Christos G.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935650
Date:
January, 2016
File:
PDF, 835 KB
english, 2016
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