Substrate temperature influence on the properties of GaN...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 01 Vol. 34; Iss. 1

Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition

Alevli, Mustafa, Gungor, Neşe, Haider, Ali, Kizir, Seda, Leghari, Shahid A., Biyikli, Necmi
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4936230
Date:
January, 2016
File:
PDF, 1.38 MB
english, 2016
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