Design and optimization of a novel structural MEMS piezoresistive pressure sensor
Li, Chuang, Cordovilla, Francisco, Jagdheesh, R., Ocaña, José L.Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3187-6
Date:
November, 2016
File:
PDF, 3.77 MB
english, 2016