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Plasma electron annealing method for recrystallization of a-Si thin films
Park, Jong-Bae, Kim, Dae Chul, Kim, Young-WooVolume:
622
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.12.025
Date:
January, 2017
File:
PDF, 1.12 MB
english, 2017