Atomic layer deposition of Nb-doped ZnO for thin film...

Atomic layer deposition of Nb-doped ZnO for thin film transistors

Shaw, A., Wrench, J. S., Jin, J. D., Whittles, T. J., Mitrovic, I. Z., Raja, M., Dhanak, V. R., Chalker, P. R., Hall, S.

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Volume:

109

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.4968194

Date:

November, 2016

File:

PDF, 603 KB

english, 2016

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