Multistep Aztec profiles by grayscale electron beam...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 11 Vol. 32; Iss. 6

Multistep Aztec profiles by grayscale electron beam lithography for angle-resolved microspectrometer applications

Zhang, Sichao, Shao, Jinhai, Liu, Jianpeng, Xu, Chen, Ma, Yaqi, Chen, Yifang, Taksatorn, Nit, Sun, Yan
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4897505
Date:
November, 2014
File:
PDF, 1009 KB
english, 2014
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