Blistering during the atomic layer deposition of iridium

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 01 Vol. 34; Iss. 1

Blistering during the atomic layer deposition of iridium

Genevée, Pascal, Ahiavi, Ernest, Janunts, Norik, Pertsch, Thomas, Oliva, Maria, Kley, Ernst-Bernhard, Szeghalmi, Adriana
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4934753
Date:
January, 2016
File:
PDF, 7.74 MB
english, 2016
Conversion to is in progress
Conversion to is failed