Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 05 Vol. 34; Iss. 3
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Differentiation of crystalline and amorphous phases in photothermorefractive glass by secondary ion mass spectrometry
Klimov, Mikhail, Glebov, Leonid, Glebova, LarissaVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943030
Date:
May, 2016
File:
PDF, 803 KB
english, 2016