Development of a suspension type sliding planar motion table using magnetic fluid lubrication
Li, Xinghui, Shinshi, Tadahiko, Hijikata, Wataru, Morimoto, YoshihiroVolume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4953653
Date:
June, 2016
File:
PDF, 5.15 MB
english, 2016