Resistive switching in nonplanar HfO 2...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 01 Vol. 33; Iss. 1

Resistive switching in nonplanar HfO 2 -based structures with variable series resistance

Čičo, Karol, Jančovič, Peter, Dérer, Jan, Šmatko, Vasilij, Rosová, Alica, Blaho, Michal, Hudec, Boris, Gregušová, Dagmar, Fröhlich, Karol
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4905727
Date:
January, 2015
File:
PDF, 1.70 MB
english, 2015
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