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Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films
Beebe, Melissa R., Beringer, Douglas B., Burton, Matthew C., Yang, Kaida, Lukaszew, R. AlejandraVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4940132
Date:
March, 2016
File:
PDF, 284 KB
english, 2016