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High rate deposition of thick epitaxial films by thermal plasma flash evaporation
Terashima, K., Yamaguchi, Norio, Hattori, Tomoyuki, Takamura, Y., Yoshida, T.Volume:
70
Language:
english
Journal:
Pure and Applied Chemistry
DOI:
10.1351/pac199870061193
Date:
January, 1998
File:
PDF, 513 KB
english, 1998