High rate deposition of thick epitaxial films by thermal...

High rate deposition of thick epitaxial films by thermal plasma flash evaporation

Terashima, K., Yamaguchi, Norio, Hattori, Tomoyuki, Takamura, Y., Yoshida, T.
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Volume:
70
Language:
english
Journal:
Pure and Applied Chemistry
DOI:
10.1351/pac199870061193
Date:
January, 1998
File:
PDF, 513 KB
english, 1998
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