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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Conformal Doping of FINFETs: a Fabrication and Metrology Challenge
Vandervorst, W., Everaert, J. L., Rosseel, E., Jurczak, M., Hoffman, T., Eyben, P., Mody, J., Zschätzsch, G., Koelling, S., Gilbert, M., Poon, T., del Agua Borniquel, J., Foad, M., Duffy, R., Pawlak,Year:
2008
Language:
english
DOI:
10.1063/1.3033660
File:
PDF, 2.46 MB
english, 2008