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The study on methane sensing with high-temperature low-power CMOS compatible silicon microheater
Ma, Hongyu, Qin, Shunli, Wang, Liying, Wang, Gang, Zhao, Xiaohu, Ding, EnjieVolume:
244
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2016.12.115
Date:
June, 2017
File:
PDF, 1.51 MB
english, 2017