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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Beyond 20nm DRAM peripheral transistor: Challenges and ion implantation solutions
Jin, Seungwoo, Lee, AnBae, Kim, ByounGyu, Jang, IlSic, Cha, JaeChun, Choi, DongGoo, Kang, Hyo Sang, Kang, HyoYoung, Cha, SeonYongYear:
2012
Language:
english
DOI:
10.1063/1.4766480
File:
PDF, 701 KB
english, 2012