Design considerations for a compact proton beam writing...

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016 / 12

Design considerations for a compact proton beam writing system aiming for fast sub-10nm direct write lithography

Xu, Xinxin, Liu, Nannan, Raman, P. Santhana, Qureshi, Sarfraz, Pang, Rudy, Khursheed, Anjam, van Kan, Jeroen A.
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Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.12.031
Date:
December, 2016
File:
PDF, 1.28 MB
english, 2016
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