Improved surface quality of layered architecture TiAlTaN/Ta...

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Surface and Coatings Technology 2016 / 12

Improved surface quality of layered architecture TiAlTaN/Ta coatings for high precision micromachining

Sui, Xudong, Li, Guojian, Jiang, Chenjie, Gao, Yang, Wang, Kai, Wang, Qiang
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.12.083
Date:
December, 2016
File:
PDF, 3.12 MB
english, 2016
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