Investigations on the emission in the extreme ultraviolet of a pseudospark based discharge light source
Bergmann, Klaus, Vieker, Jochen, von Wezyk, AlexanderVolume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4964800
Date:
October, 2016
File:
PDF, 1.11 MB
english, 2016