A Suspended Low Power Gas Sensor With In-Plane Heater

Journal of Microelectromechanical Systems 2017 / 2 Vol. 26; Iss. 1

A Suspended Low Power Gas Sensor With In-Plane Heater

Basu, Palash Kumar, Benedict, Samatha, Kallat, Sangeeth, Bhat, Navakanta
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2636333
Date:
February, 2017
File:
PDF, 687 KB
english, 2017
Conversion to is in progress
Conversion to is failed