![](/img/cover-not-exists.png)
Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
Chason, Eric, Guduru, Pradeep R.Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4949263
Date:
May, 2016
File:
PDF, 4.96 MB
english, 2016