A Rapid Vibration Reduction Method for Macro–Micro...

IEEE Transactions on Industrial Electronics 2017 / 1 Vol. 64; Iss. 1

A Rapid Vibration Reduction Method for Macro–Micro Composite Precision Positioning Stage

Zhang, Lanyu, Gao, Jian, Chen, Xin, Tang, Hui, Chen, Yun, He, Yunbo, Yang, Zhijun
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Volume:
64
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/tie.2016.2598812
Date:
January, 2017
File:
PDF, 865 KB
english, 2017
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