Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films
Sirotkin, Evgeny, Smith, Stewart, Walker, Ross, Terry, Jonathan G., Walton, Anthony J.Volume:
29
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2016.2583068
Date:
August, 2016
File:
PDF, 1.94 MB
english, 2016