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Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
Broas, Mikael, Sippola, Perttu, Sajavaara, Timo, Vuorinen, Vesa, Pyymaki Perros, Alexander, Lipsanen, Harri, Paulasto-Kröckel, MerviVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4953029
Date:
July, 2016
File:
PDF, 2.32 MB
english, 2016